Fabrication techniques for three-dimensional metamaterials in the midinfrared
(Color online) Schematic representation of the SAMPL process.
(a) Scanning electron micrograph of a patterned PMMA membrane suspended over a bowl formed in polyimide. (b) Scanning electron micrograph of gold SRR patterns deposited into the bowl after lift-off. Patterns are approximately 20° out of plane.
(Color online) Schematic representation of the 3D MPL process for a cubic lattice.
(a) Scanning electron micrograph of a patterned PMMA membrane suspended over and aligned to boxes formed in SU-8. (b) Scanning electron micrograph of gold SRR patterns deposited onto the five box surfaces after lift-off (only three surfaces visible).
(Color online) Normal incidence FTIR spectra for the structure of Fig. 2(b) compared to a planar version. No resonance is observed when the electric field is perpendicular to the gap.
(Color online) HDT spectra for a cubic lattice with a single vertical SRR per cell measured at four angles of incidence from the normal.
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