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Large area three-dimensional photonic crystals with embedded waveguides
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10.1116/1.3507887
/content/avs/journal/jvstb/28/6/10.1116/1.3507887
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3507887
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Definitions of plane-wave beam angles in the air and in the photoresist.

Image of FIG. 2.
FIG. 2.

(Color online) Cross section of a 3D pattern and pitch definitions.

Image of FIG. 3.
FIG. 3.

Latent images in the photoresist after first, second, and third exposures. (Model parameters: , , , , and .)

Image of FIG. 4.
FIG. 4.

(Color online) 3D IL PhC parameter space.

Image of FIG. 5.
FIG. 5.

(Color online) Experimental setup for 3D IL.

Image of FIG. 6.
FIG. 6.

(Color online) Hexagonal 3D IL PhCs made using three exposures with 120° rotation. Top images: mathematical simulations; bottom images: SEM images of experimental structures. (Model parameters: , , , , , and .)

Image of FIG. 7.
FIG. 7.

(Color online) Cubic 3D IL PhCs made using three exposures with 90° rotation. Top images: mathematical simulations; bottom images: SEM images of experimental structures. (Model parameters: , , , , , and .)

Image of FIG. 8.
FIG. 8.

(Color online) Embedded waveguide fabrication process.

Image of FIG. 9.
FIG. 9.

(Color online) SEM images of a waveguide on the surface of a PhC.

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/content/avs/journal/jvstb/28/6/10.1116/1.3507887
2010-11-29
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large area three-dimensional photonic crystals with embedded waveguides
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3507887
10.1116/1.3507887
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