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Nondestructive detection of deviation in integrated circuits
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10.1116/1.3518464
/content/avs/journal/jvstb/28/6/10.1116/1.3518464
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3518464
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Image of FIG. 1.
FIG. 1.

(Color online) Iterative phase reconstruction where constraints are enforced in the Fourier domain and in the wavelet domain. (a) The original sample (49–250 nm linewidth) from which diffraction measurements are obtained and the low-resolution approximation used for the wavelet constraint. (b) The reconstruction using XRDM and constraints in wavelet space. (c) The fabricated sample before depositing the layer on top under SEM.

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/content/avs/journal/jvstb/28/6/10.1116/1.3518464
2010-12-02
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nondestructive detection of deviation in integrated circuits
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3518464
10.1116/1.3518464
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