1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors
Rent:
Rent this article for
USD
10.1116/1.3553205
/content/avs/journal/jvstb/29/2/10.1116/1.3553205
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/2/10.1116/1.3553205
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic of the amorphous indium-tin-zinc oxide thin-film transistor.

Image of FIG. 2.
FIG. 2.

(Color online) Dependence of the electrical conductivity of ITZO films on the oxygen partial pressure at the working pressure of 10 mTorr during the sputtering.

Image of FIG. 3.
FIG. 3.

(Color online) X-ray diffraction patterns of ITZO films deposited with ratio of 50:1 as a function of postannealing temperature.

Image of FIG. 4.
FIG. 4.

(Color online) Carrier concentration and Hall mobility of ITZO films deposited with ratio of 50:1 as a function of postannealing temperature.

Image of FIG. 5.
FIG. 5.

(Color online) Optical transmittance spectra of the ITZO films deposited with ratio of 50:1 at room temperature and then annealed at . The inset is the plot of vs .

Image of FIG. 6.
FIG. 6.

(Color online) (a) Drain current–drain voltage characteristics and (b) the corresponding drain current–gate voltage characteristics of the thin-film transistors fabricated at a low temperature of at a fixed drain voltage of 15 V in saturation region. (c) Dependence of on the postannealing temperatures.

Loading

Article metrics loading...

/content/avs/journal/jvstb/29/2/10.1116/1.3553205
2011-02-02
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/2/10.1116/1.3553205
10.1116/1.3553205
SEARCH_EXPAND_ITEM