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Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
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10.1116/1.3581107
/content/avs/journal/jvstb/29/3/10.1116/1.3581107
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/3/10.1116/1.3581107
/content/avs/journal/jvstb/29/3/10.1116/1.3581107
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/content/avs/journal/jvstb/29/3/10.1116/1.3581107
2011-04-22
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/3/10.1116/1.3581107
10.1116/1.3581107
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