1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
Rent:
Rent this article for
USD
10.1116/1.3581107
/content/avs/journal/jvstb/29/3/10.1116/1.3581107
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/3/10.1116/1.3581107

Figures

Image of FIG. 1.
FIG. 1.

Representative two-dimensional snapshots of with for (a) and (b) .

Image of FIG. 2.
FIG. 2.

Fixed- slice through for and .

Image of FIG. 3.
FIG. 3.

(a) LER spectra of interface with for and . and (b) LWR spectra of mesodomain with for and .

Image of FIG. 4.
FIG. 4.

LER spectra of interfaces with for (a) and (b) .

Image of FIG. 5.
FIG. 5.

LWR spectra of mesodomains with for (a) and (b) .

Image of FIG. 6.
FIG. 6.

LER spectra of interface with and for (a) and (b) .

Image of FIG. 7.
FIG. 7.

LWR spectra of mesodomain with and for (a) and (b) .

Image of FIG. 8.
FIG. 8.

Plot of the interface-interface covariance for and with and .

Tables

Generic image for table
TABLE I.

Model and simulation parameters and measured observables.

Loading

Article metrics loading...

/content/avs/journal/jvstb/29/3/10.1116/1.3581107
2011-04-22
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/3/10.1116/1.3581107
10.1116/1.3581107
SEARCH_EXPAND_ITEM