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Developing Ni–Al and Ru–Al intermetallic films for use in microelectromechanical systems
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10.1116/1.3607314
/content/avs/journal/jvstb/29/4/10.1116/1.3607314
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/4/10.1116/1.3607314
/content/avs/journal/jvstb/29/4/10.1116/1.3607314
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/content/avs/journal/jvstb/29/4/10.1116/1.3607314
2011-08-02
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Developing Ni–Al and Ru–Al intermetallic films for use in microelectromechanical systems
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/4/10.1116/1.3607314
10.1116/1.3607314
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