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Suitability of thin poly(dimethylsiloxane) as an antisticking layer for UV nanoimprinting
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10.1116/1.3653226
/content/avs/journal/jvstb/29/6/10.1116/1.3653226
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3653226
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Chemical structure of P7266-DMS.

Image of FIG. 2.
FIG. 2.

(Color online) Schematic diagram of coating process. (1) The substrate surface was cleaned with an ozone cleaner. (2) The P7266-DMS was spin-coated on the substrate. (3) The substrate was annealed at 200 °C in a vacuum at 1.0 × 10−3 Pa for 10 h. (4) After annealing, the substrate was rinsed with toluene to remove the excess P7266-DMS.

Image of FIG. 3.
FIG. 3.

(Color online) XPS wide scan spectra of Si substrate, F-ASL, and thin PDMS layer. Although an F1s peak was observed in the F-ASL spectrum but not in the PDMS spectrum, the PDMS spectrum had the highest C1s peak intensity.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Measurement schematic of the force curve by SPM. (b) An example of the force curve. The numbers in the force curve correspond to the numbers in the measurement schematic of the force curve.

Image of FIG. 5.
FIG. 5.

(Color online) (a) Measurement schematic of the frictional curve by SPM. In the case of a low-friction surface, the torsional displacement of the cantilever was small. On the contrary, there was a large torsional displacement of the cantilever when the surface had a high amount of friction. (b) An example of the frictional curve. The frictional curve was obtained from the torsional displacement of the cantilever.

Image of FIG. 6.
FIG. 6.

(Color online) Force curves of the (a) Si substrate, (b) F-ASL, and (c) PDMS. (d) Adhesion forces of the Si substrate, F-ASL, and PDMS. The adhesion forces of both the F-ASL and the thin PDMS layer were lower than that of the Si substrate.

Image of FIG. 7.
FIG. 7.

(Color online) Frictional curves of the (a) Si substrate, (b) F-ASL, and (c) PDMS. (d) Frictional forces of the Si substrate, F-ASL, and PDMS. The PDMS had a vanishing low value.

Image of FIG. 8.
FIG. 8.

(Color online) DFM-AFM images of (a) F-ASL, and (b) PDMS. The thin PDMS layer surface was very smooth.

Image of FIG. 9.
FIG. 9.

(Color online) (a) SEM image of a high resolution imprinted pattern. SEM images of the (a) first and (b) 150th imprinted pattern. After 150 UV nanoimprintings, the pattern was still clearly imprinted on the resin.

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/content/avs/journal/jvstb/29/6/10.1116/1.3653226
2011-11-03
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Suitability of thin poly(dimethylsiloxane) as an antisticking layer for UV nanoimprinting
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3653226
10.1116/1.3653226
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