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Multilayer infrared metamaterial fabrication using membrane projection lithography
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10.1116/1.3653258
/content/avs/journal/jvstb/29/6/10.1116/1.3653258
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3653258
/content/avs/journal/jvstb/29/6/10.1116/1.3653258
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/content/avs/journal/jvstb/29/6/10.1116/1.3653258
2011-11-11
2014-12-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multilayer infrared metamaterial fabrication using membrane projection lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3653258
10.1116/1.3653258
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