1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Carbon nanomechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography
Rent:
Rent this article for
USD
10.1116/1.3662083
/content/avs/journal/jvstb/29/6/10.1116/1.3662083
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3662083
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the carbon resonator fabrication process using FIB/EB dual-beam lithography and IB curing.

Image of FIG. 2.
FIG. 2.

(Color online) Solubility characteristics of PMMA as a negative-tone resist for EB lithography.

Image of FIG. 3.
FIG. 3.

(Color online) Relationship between the ion dose and structural properties of PMMA exposed by 30-kV Ga+ FIB: (a) ion-dose dependence of the developed thickness and the edge height, A inset shows the schematic of cross-section of PMMA film with a trench structure; AFM images of the PMMA film exposed to an ion dose of (b) 0.05 × 1015 ions/cm2, (c) 0.4 × 1015 ions/cm2, and (d) 1 × 1015 ions/cm2.

Image of FIG. 4.
FIG. 4.

SIM images of (a) a beam-type resonant structure and (b) a suspended mesh structure. These suspended PMMA structures were fabricated by FIB exposures with an ion dose of 3 × 1015 ions/cm2 and 1 × 1015 ions/cm2, respectively.

Image of FIG. 5.
FIG. 5.

SIM images of a suspended PMMA nanowire (a) before and after ion-beam modifications with an ion dose of (b) 5 × 1015 ions/cm2 and (c) 10 × 1015 ions/cm2.

Image of FIG. 6.
FIG. 6.

(Color online) Raman spectra before and after curing using IB modification with doses of (i) 1 × 1015 ions/cm2 and (ii) 10 × 1015 ions/cm2.

Image of FIG. 7.
FIG. 7.

(Color online) Load–displacement curve obtained by indentation testing of PMMA film cured by ion-beam modification with an ion dose of 10 × 1015 ions/cm2.

Image of FIG. 8.
FIG. 8.

(Color online) Vibration spectra of suspended PMMA nanowires before and after curing using IB modification with doses of (i) 1 × 1015 ions/cm2, (ii) 5 × 1015 ions/cm2, and (iii) 10 × 1015 ions/cm2.

Loading

Article metrics loading...

/content/avs/journal/jvstb/29/6/10.1116/1.3662083
2011-12-02
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Carbon nanomechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/29/6/10.1116/1.3662083
10.1116/1.3662083
SEARCH_EXPAND_ITEM