Nanofabrication of doped, complex oxides
(Color online) Experimental procedure used in the template guided deposition of Nb-STO at various steps—(a) shows the PMMA coated substrate before EBL, (b) shows the trenches in the PMMA after EBL exposure and developing in MIBK-IPA, (c) C shows the template filled with NbSTO after pulsed laser deposition (PLD) and (d) D shows the freestanding structures after liftoff of the resist in the solvent bath.
(Color online) Scanning electron microscopy (SEM) image of Nb-STO wires produced using a 10 nm (a) and 30 nm (b) nominal width and 1 μm pitch. Images were taken at 5 kV with an 8 mm working distance after Au/Pt coating of samples, and SEM measured dimensions are indicated by the arrows.
(Color online) Scanning electron microscopy (SEM) image of Nb-STO nanodots produced using a box pattern of 50 nm side width 500 nm pitch (a) and 100 nm side width 1 μm pitch (b). Images were taken at 5 kV with an 8 mm working distance after Au/Pt coating of samples, and SEM measured dimensions are indicated by the arrows.
(Color online) Contact mode atomic force microscopy (AFM) images of wire type nanostructures with actual widths of 100 nm (a), 190 nm (b), 290 nm (c) and 530 nm (d) as determined by scanning electron microscopy (SEM).
X-ray diffraction (XRD) spectrum of Nb-STO films deposited at room temperature (RT NbSTO), room temperature followed by annealing (A NbSTO) and at high temperature (HT NbSTO) on LaAlO3 (100) substrates.
X-ray photoelectron spectroscopy (XPS) sputter depth profile of an Nb-STO film on SrTiO3 (100) substrate annealed at 650 °C.
Calculation of lattice spacing for room temperature deposited and unnealed film with only LaAlO3 (200) substrate peak (RT NbSTO), the crystalline peaks produced by annealing the room temperature deposited film (A NbSTO) and the high temperature deposited film (HT NbSTO).
Sheet resistance values for high temperature deposited (HT NbSTO), room temperature deposited then annealed (A NbSTO) and room temperature deposited without annealing (RT NbSTO) films as measured by a Van der Pauw probe configuration.
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