Integration of a thin film III–V edge emitting laser and a polymer microring resonator on an SiO2/Si substrate
(Color online) (a) Cross section of integrated thin film III–V edge emitting laser structure prior to patterning of n-contact. (b) Patterning of p-contact pad on SiO2/Si with placement of thin film laser. (c) Patterning of n-metal contact on laser along with fiducials for alignment. (d) Patterning of SU-8 tapered waveguide with drop and through ports for microring resonator. (e) Interlayer dielectric of PMMA, followed by patterning of the SU-8 microring resonator. (f) Photomicrograph of integrated laser with embedded front facet and tapered SU-8 waveguide on SiO2/Si. (g) Photomicrograph of the SU-8 microring resonator.
(Color online) (a) Microring resonator output power vs laser drive current for laser + separated waveguide configuration from (a) drop port and (b) through port.
(Color online) Results for system with laser with embedded waveguide + overlapping polymer waveguide. (a) L–I characteristics of laser measured from through port. (b) Optical spectra from through port and drop port.
Article metrics loading...
Full text loading...