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High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures
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10.1116/1.3697753
/content/avs/journal/jvstb/30/3/10.1116/1.3697753
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/3/10.1116/1.3697753
/content/avs/journal/jvstb/30/3/10.1116/1.3697753
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/content/avs/journal/jvstb/30/3/10.1116/1.3697753
2012-03-28
2014-09-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/3/10.1116/1.3697753
10.1116/1.3697753
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