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Low temperature atomic layer deposited Al-doped ZnO thin films and associated semiconducting properties
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10.1116/1.4710519
/content/avs/journal/jvstb/30/3/10.1116/1.4710519
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/3/10.1116/1.4710519
/content/avs/journal/jvstb/30/3/10.1116/1.4710519
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/content/avs/journal/jvstb/30/3/10.1116/1.4710519
2012-04-30
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature atomic layer deposited Al-doped ZnO thin films and associated semiconducting properties
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/3/10.1116/1.4710519
10.1116/1.4710519
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