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Electron beam lithography on vertical side faces of micrometer-order Si block
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10.1116/1.4719561
/content/avs/journal/jvstb/30/4/10.1116/1.4719561
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/4/10.1116/1.4719561
/content/avs/journal/jvstb/30/4/10.1116/1.4719561
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/content/avs/journal/jvstb/30/4/10.1116/1.4719561
2012-05-22
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron beam lithography on vertical side faces of micrometer-order Si block
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/4/10.1116/1.4719561
10.1116/1.4719561
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