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Optimization of the ammonium sulfide (NH4)2S passivation process on InSb(111)A
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10.1116/1.4719961
/content/avs/journal/jvstb/30/4/10.1116/1.4719961
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/4/10.1116/1.4719961

Figures

Image of FIG. 1.
FIG. 1.

Normalized XPS spectra of (a) In 3d 5/2, (b) O 1s and Sb 3d core levels after various (NH4)2S treatments and subsequent annealing at 300 °C for 30 min.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Peak fitted Sb 3d and O 1s XPS spectra from sample (i) with a significant amount of native oxide present before and after annealing at 300 °C and (b) Sb 3d and O 1s spectra after sulfur passivation with subsequent annealing at 300 °C from sample (v).

Image of FIG. 3.
FIG. 3.

(Color online) (a) Total O 1s peak areas and (b) ratio of the area of fitted antimony oxide or sulfur components to bulk peak for the samples investigated after sulfur treatment and subsequent annealing at 300 °C for 30 min.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Peak fitted In 3d 5/2 spectra from sample (i) showing the native oxide and after annealing at 300 °C and (b) sample (v) after sulfur treatment and subsequent annealing. (c) The ratio of the fitted components to the substrate before and after ALD exposure.

Image of FIG. 5.
FIG. 5.

(Color online) Normalized S 2p spectra from sample (v) after sulfur treatment and with subsequent annealing to 300 °C showing the difference in the line shape.

Image of FIG. 6.
FIG. 6.

(Color online) AFM images from samples (i) and (v)–(vii) with 3 µm × 3 µm scan areas after (NH4)2S treatment and subsequent annealing at 300 °C.

Tables

Generic image for table
TABLE I.

Root-mean-square roughness from AFM measurements of samples after (NH4)2S and subsequent annealing.

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/content/avs/journal/jvstb/30/4/10.1116/1.4719961
2012-05-22
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optimization of the ammonium sulfide (NH4)2S passivation process on InSb(111)A
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/4/10.1116/1.4719961
10.1116/1.4719961
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