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Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nm
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10.1116/1.4739000
/content/avs/journal/jvstb/30/5/10.1116/1.4739000
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/5/10.1116/1.4739000
/content/avs/journal/jvstb/30/5/10.1116/1.4739000
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/content/avs/journal/jvstb/30/5/10.1116/1.4739000
2012-07-27
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Outgassing and photochemical studies of photosensitive films upon irradiation at 13.5 nm
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/5/10.1116/1.4739000
10.1116/1.4739000
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