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Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanks
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10.1116/1.4746245
/content/avs/journal/jvstb/30/5/10.1116/1.4746245
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/5/10.1116/1.4746245
/content/avs/journal/jvstb/30/5/10.1116/1.4746245
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/content/avs/journal/jvstb/30/5/10.1116/1.4746245
2012-08-14
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Simulation study of cleaning induced extreme ultraviolet reflectivity loss mechanisms on mask blanks
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/5/10.1116/1.4746245
10.1116/1.4746245
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