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Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists
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10.1116/1.4758772
/content/avs/journal/jvstb/30/6/10.1116/1.4758772
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4758772
/content/avs/journal/jvstb/30/6/10.1116/1.4758772
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/content/avs/journal/jvstb/30/6/10.1116/1.4758772
2012-10-15
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4758772
10.1116/1.4758772
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