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Using electron spectroscopy to verify the model of Ga implanted during focused ion beam circuit editing
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10.1116/1.4759249
/content/avs/journal/jvstb/30/6/10.1116/1.4759249
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4759249
/content/avs/journal/jvstb/30/6/10.1116/1.4759249
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/content/avs/journal/jvstb/30/6/10.1116/1.4759249
2012-10-16
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Using electron spectroscopy to verify the model of Ga implanted during focused ion beam circuit editing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4759249
10.1116/1.4759249
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