(Color online) Schematic images of patterned media formed by DSA.
(Color online) Schematic image of custom-built solvent annealing equipment.
(Color online) Relationship between polymerization index and domain dimension. Solid circles show the experimental data and solid line shows the approximation.
(Color online) Fabrication of PDMS dot pattern and SEM images of H-PS-PDMS and L-PS-PDMS. (a) The experimental process. (b) SEM images of H-PS-PDMS and (b) L-PS-PDMS. Scale bars are 100 nm.
(Color online) Evaluation results of solvent vapor annealing. (a) Solubility parameters of polymer materials and solvents. SEM images of H-PS-PDMS dot pattern treated in (b) hexane, (c) acetone, and (d) NMP. Scale bars are 200 nm.
(Color online) SEM images and Voronoi diagrams of L-PS-PDMS dot pattern. SEM images of (a) thermally treated film and (b) solvent-annealed film. Voronoi diagrams of (c) thermally treated film and (d) solvent-annealed film. Scale bars are 100 nm.
(Color online) Counted ratios of 4 to 7 fold sites of Voronoi diagram.
(Color online) Fabrication process of BPM template applying graphoepitaxy method.
SEM images of (a) thermally annealed and (b) solvent-annealed PDMS dot patterns for address area.
Wide-area SEM images of PDMS dot pattern for address area.
Characteristics of polymers used for BPM fabrication.
Dot-pitch of the PDMS dot-arrays comparing thermally treated and treated in solvent vapor.
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