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Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly
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10.1116/1.4763356
/content/avs/journal/jvstb/30/6/10.1116/1.4763356
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4763356

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic images of patterned media formed by DSA.

Image of FIG. 2.
FIG. 2.

(Color online) Schematic image of custom-built solvent annealing equipment.

Image of FIG. 3.
FIG. 3.

(Color online) Relationship between polymerization index and domain dimension. Solid circles show the experimental data and solid line shows the approximation.

Image of FIG. 4.
FIG. 4.

(Color online) Fabrication of PDMS dot pattern and SEM images of H-PS-PDMS and L-PS-PDMS. (a) The experimental process. (b) SEM images of H-PS-PDMS and (b) L-PS-PDMS. Scale bars are 100 nm.

Image of FIG. 5.
FIG. 5.

(Color online) Evaluation results of solvent vapor annealing. (a) Solubility parameters of polymer materials and solvents. SEM images of H-PS-PDMS dot pattern treated in (b) hexane, (c) acetone, and (d) NMP. Scale bars are 200 nm.

Image of FIG. 6.
FIG. 6.

(Color online) SEM images and Voronoi diagrams of L-PS-PDMS dot pattern. SEM images of (a) thermally treated film and (b) solvent-annealed film. Voronoi diagrams of (c) thermally treated film and (d) solvent-annealed film. Scale bars are 100 nm.

Image of FIG. 7.
FIG. 7.

(Color online) Counted ratios of 4 to 7 fold sites of Voronoi diagram.

Image of FIG. 8.
FIG. 8.

(Color online) Fabrication process of BPM template applying graphoepitaxy method.

Image of FIG. 9.
FIG. 9.

SEM images of (a) thermally annealed and (b) solvent-annealed PDMS dot patterns for address area.

Image of FIG. 10.
FIG. 10.

Wide-area SEM images of PDMS dot pattern for address area.

Tables

Generic image for table
TABLE I.

Characteristics of polymers used for BPM fabrication.

Generic image for table
TABLE II.

Dot-pitch of the PDMS dot-arrays comparing thermally treated and treated in solvent vapor.

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/content/avs/journal/jvstb/30/6/10.1116/1.4763356
2012-10-23
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4763356
10.1116/1.4763356
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