1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
Rent:
Rent this article for
USD
10.1116/1.4767235
/content/avs/journal/jvstb/30/6/10.1116/1.4767235
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4767235
/content/avs/journal/jvstb/30/6/10.1116/1.4767235
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/avs/journal/jvstb/30/6/10.1116/1.4767235
2012-11-26
2014-12-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/30/6/10.1116/1.4767235
10.1116/1.4767235
SEARCH_EXPAND_ITEM