(Color online) Process sequence for plasma treatment.
(Color online) Schematic of InGaN/GaN vertical LEDs.
(Color online) Forward voltage characteristics for different types of LEDs at 350 mA. Types A and B are Cr/Au and Al/Ti electrodes, respectively, without plasma treatment. Types C and D are plasma-treated Al/Ti electrodes. All types except for type C are cleaned with HCl prior to n-metal deposition.
(Color online) XPS spectra of the Ga 3d for Ar plasma-treated LEDs. The control sample is type A and the Ar treated sample is type E in Table I .
(Color online) XPS spectra of the Ga 3d for different types of LEDs.
(Color online) Output power change and percentage change in conversion efficiency for different types of LEDs.
XPS elemental composition of control and plasma-treated samples.
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