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Benefits of plasma treatments on critical dimension control and line width roughness transfer during gate patterning
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10.1116/1.4773063
/content/avs/journal/jvstb/31/1/10.1116/1.4773063
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/1/10.1116/1.4773063
/content/avs/journal/jvstb/31/1/10.1116/1.4773063
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/content/avs/journal/jvstb/31/1/10.1116/1.4773063
2012-12-26
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Benefits of plasma treatments on critical dimension control and line width roughness transfer during gate patterning
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/1/10.1116/1.4773063
10.1116/1.4773063
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