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Effect of neutral beam etching on mechanical property of microcantilevers
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10.1116/1.4788829
/content/avs/journal/jvstb/31/2/10.1116/1.4788829
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/2/10.1116/1.4788829
/content/avs/journal/jvstb/31/2/10.1116/1.4788829
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/content/avs/journal/jvstb/31/2/10.1116/1.4788829
2013-01-23
2015-06-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of neutral beam etching on mechanical property of microcantilevers
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/2/10.1116/1.4788829
10.1116/1.4788829
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