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3D stepped electrodes on a flexible substrate with permanently bonded poly(dimethylsiloxane) channels for moving microfluid
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10.1116/1.4790651
/content/avs/journal/jvstb/31/2/10.1116/1.4790651
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/2/10.1116/1.4790651
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the cross-sections of microelectrodes illustrates the time averaged slip velocity and the flow in the bulk liquid of (a) symmetric planar electrodes and (b) 3D stepped electrodes. (c)Schematic diagram of the top view of the interdigitated electrode array. The regions delineated by the black rectangles are raised up.

Image of FIG. 2.
FIG. 2.

(Color online) (a)–(e) Schematic diagrams of the fabrication process (not drawn to scale); (f) Exploded view shows major functional layers and structural features; (g) Photograph of a complete device.

Image of FIG. 3.
FIG. 3.

(Color online) Microelectrode array is characterized by a profilometer where the electrode height is obtained along aa′.

Image of FIG. 4.
FIG. 4.

SEM image shows the structures and metal coverage of the microelectrode array.

Image of FIG. 5.
FIG. 5.

(Color online) (a) Setup for shear testing shown in a schematic diagram. (b) Thin layer of PDMS is left after pulling off the PDMS block.

Image of FIG. 6.
FIG. 6.

(Color online) After annealing, HSQ develops microcracks without a Ti layer (left), but no microcracks with a 20 nm Ti layer beneath the HSQ layer (right).

Image of FIG. 7.
FIG. 7.

(Color online) Generation of microcracks in the bonding layer at (a) no bending, (b) warping against a cylindrical surface of an arc angle of 15° and with a radius of 57 mm, (c) warping against a cylindrical surface of an arc angle of 45° and with a radius of 22 mm, (d) folding at 45°, (e) folding at 90°, and (f) folding at 120° (the dotted lines indicate the original position of substrate without any deformation, while the arrow shows the folding direction).

Image of FIG. 8.
FIG. 8.

(Color online) Frequency response at 5Vpp ac voltage.

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/content/avs/journal/jvstb/31/2/10.1116/1.4790651
2013-02-08
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: 3D stepped electrodes on a flexible substrate with permanently bonded poly(dimethylsiloxane) channels for moving microfluid
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/2/10.1116/1.4790651
10.1116/1.4790651
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