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Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
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10.1116/1.4798399
/content/avs/journal/jvstb/31/3/10.1116/1.4798399
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4798399
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of a two-qubit quantum processor where the qubits are coupled via a half wavelength resonator quantum bus and two Al CPW transmission lines creating four discontinuities in the ground planes (Ref. ); (b) the same circuit with Al air-bridges suppressing spurious resonant modes originating from disconnected ground planes.

Image of FIG. 2.
FIG. 2.

Equivalent circuit of a lossless CPW transmission line terminated with a matched load including the shunt capacitance of the air-bridge .

Image of FIG. 3.
FIG. 3.

(Color online) simulation comparing the input reflection coefficients vs frequency for a 10 mm transmission line with 1–4 air-bridges. Here, we have assumed that the sum capacitance of all air-bridges is 0.04 pF. The air-bridges are equidistantly distributed with a distance, , between neighboring ports or air-bridges.

Image of FIG. 4.
FIG. 4.

(Color online) simulation comparing the input reflection coefficients vs frequency for a transmission line with four air-bridges but with different distances, , between them. The curve for n = 1, L = 5.0 mm is the same as in Fig. 3 , where denotes the distance to the measurement ports.

Image of FIG. 5.
FIG. 5.

Details of the Al air-bridge fabrication process flow.

Image of FIG. 6.
FIG. 6.

(Color online) 3D animation of 8.5 m high SF15 support layer and SU-8 liftoff resist layer with (a) undercut <8.5 m but greater than 2 m, (b)undercut >10.5 m.

Image of FIG. 7.
FIG. 7.

Scanning electron micrograph of a (a) 300 m long Al air-bridge with height 8.5 m, (b) 300 m long Al air-bridge with height 15 m, (c) 500 m long Al air-bridge on Al CPW, (d) 15 m high Al air-bridge span.

Image of FIG. 8.
FIG. 8.

Schematic of the reflection measurement microwave setup in the He cryostat. The gray boxes are microwave attenuators with the attenuation indicated in dB. The low noise amplifier (LNA) has a gain of 38 dB and the cutoff frequency of the low pass filter (LPF) is 8 GHz.

Image of FIG. 9.
FIG. 9.

Measurement of the input reflection of a CPW with 300 m long, 8.5 m high Al air-bridges at a temperature of 4.2 K.

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/content/avs/journal/jvstb/31/3/10.1116/1.4798399
2013-04-04
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4798399
10.1116/1.4798399
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