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In situ Auger probe enabling epitaxy composition control of alloys by elemental surface analysis
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10.1116/1.4798653
/content/avs/journal/jvstb/31/3/10.1116/1.4798653
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4798653
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental setup for the AP on the GEN II MBE system.

Image of FIG. 2.
FIG. 2.

AP spectra of each Terfenol component. The Auger spectrum intensity is vertically offset by 20% for each successive element from Fe to Dy for clarity.

Image of FIG. 3.
FIG. 3.

(Color) Various AP spectra of a Tb layer overgrown up to 10% of a monolayer of Dy measured in 2% increments.

Image of FIG. 4.
FIG. 4.

(Color) Various AP Auger spectra of a Tb layer overgrown up to 100% of a monolayer of Dy over a broad energy range.

Image of FIG. 5.
FIG. 5.

XPS spectrum of a Terfenol-D layer exhibiting a high concentration of oxygen. The XPS survey data also show about a +1 eV chemical shift of each of the labeled metal lines due to oxidation. Each sample was capped with Al prior to air exposure so this oxidation is a result of oxidation in the MBE system.

Image of FIG. 6.
FIG. 6.

(Color online) Auger spectra of the Tb before and after 30 h in the growth chamber measured using the two different electron guns. From top to bottom: RHEED 30 h after and immediately after growth, near normal electron gun 30 h after and immediately after growth, respectively.

Image of FIG. 7.
FIG. 7.

(Color online) RHEED generated AP Auger spectra of the Tb grown at 1220 °C, 7.2 × 10 Torr BEP which does not show a noticeable level oxygen contamination (bottom). Oxygen is detected in the film grown at 1300 °C, 3.9 × 10 Torr BEP (top).

Image of FIG. 8.
FIG. 8.

(Color online) SIMS depth profile of each Terfenol component grown on Si and capped in Al. From a to c are each film with estimated thicknesses: Tb 970 Å, Dy 1370 Å, Fe 1500 Å each with a 350 Å Al cap. The vertical bar shows the substrate/film interface. Each depth profile was configured to detect the metal-oxide rather than elemental oxygen.

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/content/avs/journal/jvstb/31/3/10.1116/1.4798653
2013-04-09
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ Auger probe enabling epitaxy composition control of alloys by elemental surface analysis
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4798653
10.1116/1.4798653
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