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Tungsten-based pillar deposition by helium ion microscope and beam-induced substrate damage
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10.1116/1.4800983
/content/avs/journal/jvstb/31/3/10.1116/1.4800983
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4800983
/content/avs/journal/jvstb/31/3/10.1116/1.4800983
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/content/avs/journal/jvstb/31/3/10.1116/1.4800983
2013-04-10
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tungsten-based pillar deposition by helium ion microscope and beam-induced substrate damage
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4800983
10.1116/1.4800983
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