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Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates
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10.1116/1.4801008
/content/avs/journal/jvstb/31/3/10.1116/1.4801008
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4801008
/content/avs/journal/jvstb/31/3/10.1116/1.4801008
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/content/avs/journal/jvstb/31/3/10.1116/1.4801008
2013-04-15
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4801008
10.1116/1.4801008
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