(Color online) Scheme of the stamp forming system of the e-beam writer Tesla BS-600.
(Color online) Principle of the stamp forming system in the chosen coordinates shown from the top view, corresponding to Fig. 1 . The principle is shown using (a) the 6.3 μm× 6.3 μm and (b) the 4.0 μm× 3.0 μm stamp sizes as examples.
Example of the current density determination in the 4,4th element of an e-beam raster. (a) The raster of elements with the element size is shown. The stamp (b) , (c) , (d) , and (e) is formed in the raster. See details in the text.
(a) Current density distribution and (b) the relative standard deviation measured in a e-beam raster with elements, linearly interpolated to elements.
Measured current density distribution in the e-beam raster with elements of the (a) unadjusted and (b) adjusted electron-optical system.
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