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Fabrication of metal roller mold with submicrometer feature size using contact printing photolithography technique
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10.1116/1.4804275
/content/avs/journal/jvstb/31/3/10.1116/1.4804275
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4804275
/content/avs/journal/jvstb/31/3/10.1116/1.4804275
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/content/avs/journal/jvstb/31/3/10.1116/1.4804275
2013-05-10
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of metal roller mold with submicrometer feature size using contact printing photolithography technique
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/3/10.1116/1.4804275
10.1116/1.4804275
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