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Micromirrors connected in series for low voltage operation in vacuum
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Design of micromirrors connected in series. The inset shows a torsion bar of the center-mirror.

Image of FIG. 2.
FIG. 2.

(Color online) Displacements of series-mirror in the equivalent mode to the resonant mode of single mirror, (a) maximum counterclockwise rotation of center-mirror, (b) maximum clockwise rotation.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Pattern on upper silicon layer of SOI wafer, (b) pattern on silicon substrate, and (c) schematic diagram of fabrication steps.

Image of FIG. 4.
FIG. 4.

(Color online) Optical micrographs of fabricated series-mirror. The respective parts are shown in magnified images.

Image of FIG. 5.
FIG. 5.

(Color online) Velocity distributions of center and side-mirrors measured by an optical interferometer. The distributions are superposed on the measured surface profiles of the mirrors, (a) at maximum velocity (100 m/s) and rotation angle of zero, (b) at minimum velocity and maximum rotation angle (0.19 × 10 degrees), and (c) at maximum reverse velocity and rotation angle of zero.

Image of FIG. 6.
FIG. 6.

Oscillation curves measured as a function of frequency at pressures of (a) 1000 Pa and (b) 1 Pa.

Image of FIG. 7.
FIG. 7.

(Color online) Quality-factors of single micromirror and series-micromirror measured as a function of pressure.

Image of FIG. 8.
FIG. 8.

(Color online) Rotation angles measured as a function of operation voltage for single mirror and series-mirror at pressure of 1 Pa.


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Scitation: Micromirrors connected in series for low voltage operation in vacuum