(Color online) Design of micromirrors connected in series. The inset shows a torsion bar of the center-mirror.
(Color online) Displacements of series-mirror in the equivalent mode to the resonant mode of single mirror, (a) maximum counterclockwise rotation of center-mirror, (b) maximum clockwise rotation.
(Color online) (a) Pattern on upper silicon layer of SOI wafer, (b) pattern on silicon substrate, and (c) schematic diagram of fabrication steps.
(Color online) Optical micrographs of fabricated series-mirror. The respective parts are shown in magnified images.
(Color online) Velocity distributions of center and side-mirrors measured by an optical interferometer. The distributions are superposed on the measured surface profiles of the mirrors, (a) at maximum velocity (100 μm/s) and rotation angle of zero, (b) at minimum velocity and maximum rotation angle (0.19 × 10−3 degrees), and (c) at maximum reverse velocity and rotation angle of zero.
Oscillation curves measured as a function of frequency at pressures of (a) 1000 Pa and (b) 1 Pa.
(Color online) Quality-factors of single micromirror and series-micromirror measured as a function of pressure.
(Color online) Rotation angles measured as a function of operation voltage for single mirror and series-mirror at pressure of 1 Pa.
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