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High precision dynamic alignment and gap control for optical near-field nanolithography
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10.1116/1.4809519
/content/avs/journal/jvstb/31/4/10.1116/1.4809519
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/4/10.1116/1.4809519
/content/avs/journal/jvstb/31/4/10.1116/1.4809519
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/content/avs/journal/jvstb/31/4/10.1116/1.4809519
2013-06-06
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High precision dynamic alignment and gap control for optical near-field nanolithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/4/10.1116/1.4809519
10.1116/1.4809519
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