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Reducing hole-size variation and defect ratio after pattern transfer by using self-assembled polymer with spherical structure
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10.1116/1.4811648
/content/avs/journal/jvstb/31/4/10.1116/1.4811648
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/4/10.1116/1.4811648
/content/avs/journal/jvstb/31/4/10.1116/1.4811648
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/content/avs/journal/jvstb/31/4/10.1116/1.4811648
2013-07-16
2014-11-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reducing hole-size variation and defect ratio after pattern transfer by using self-assembled polymer with spherical structure
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/4/10.1116/1.4811648
10.1116/1.4811648
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