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Volume 31 Number 6 Front cover image - large version

Volume 31, Issue 6, November 2013

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FEATURED ARTICLE
  • Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope
  • Electronic & Optoelectronic Materials, Devices & Processing
  • Lithography
  • Nanometer Science & Technology
  • Microelectronic & Nanoelectronic Devices
  • 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
    • EIPBN Review Articles
    • EIPBN Invited Articles
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Scitation: Journal of Vacuum Science & Technology B - Volume 31 Number 6
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6
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