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Advances in ion beam micromachining for complex 3D microfluidics
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10.1116/1.4819302
/content/avs/journal/jvstb/31/6/10.1116/1.4819302
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4819302
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) SEM micrograph images of a section of a straight 3D mixer. Tilted view at 52°. Images show the three inlet channels and the beginning of the mixer channel. (a) After phase 1 (lithography and etch), (b) after IBμM.

Image of FIG. 2.
FIG. 2.

(Color online) SEM micrograph images of using BOE etch for several hours on a test sample with significant material redeposition. Sample was milled at two segments to the side. Roughness on the top surface is due to over etch of a porous SiO film. (a) after IBμM, (b) after 4 h of BOE etch.

Image of FIG. 3.
FIG. 3.

SEM micrograph images of a section of a straight 3D mixer after BOE etch. (a) and (b) are at different magnifications.

Image of FIG. 4.
FIG. 4.

SEM micrograph images of a section of a serpentine 3D mixer. Tilted view at 52°. Images show the three inlet channels and the beginning of the mixer channel. (a) After phase 1 (lithography and etch), (b) after IBμM.

Image of FIG. 5.
FIG. 5.

SEM micrograph image of a section of a serpentine 3D mixer after BOE etch.

Image of FIG. 6.
FIG. 6.

SEM micrograph image of a section of a serpentine 3D mixer before BOE etch showing details of the #D texturing done to the bottom of the mixer.

Image of FIG. 7.
FIG. 7.

(Color online) Views of the CAD layout used for the fabrication of the structures shown in Fig. 6 .

Image of FIG. 8.
FIG. 8.

(Color online) View of CAD data used for making the 3D serpentine mixer. Data consist of curved polygons that have no cuts through the entire length of the device.

Image of FIG. 9.
FIG. 9.

(Color online) SEM micrograph images showing examples of failed writing strategies of curved structures using IBμM. (a) Breaking curved structures into arc segments, (b) using inward concentric writing.

Image of FIG. 10.
FIG. 10.

(Color online) SEM micrograph images showing examples of successful writing strategies of curved structures using IBμM: no arcs, single polygon, and transverse writing strategy.

Image of FIG. 11.
FIG. 11.

(Color online) Pictures of assembled microfluidic devices.

Image of FIG. 12.
FIG. 12.

(Color online) Fluorescence images of: (a) a straight non-3D mixer, (b) a straight 3D mixer, and (c) a serpentine 3D mixer. All images were acquired at same flow rate of 20 l/min through the mixers. Width of inlets is 60 m, length of 3D mixers is 420 m.

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/content/avs/journal/jvstb/31/6/10.1116/1.4819302
2013-08-30
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Advances in ion beam micromachining for complex 3D microfluidics
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4819302
10.1116/1.4819302
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