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Surface-patterned micromechanical elements by polymer injection molding with hybrid molds
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Image of FIG. 1.
FIG. 1.

(Color online) Combined mold insert with a 500m-high LiGA frame, a bottom plate with diffractive optical elements placed at the clamping unit of the injection molding tool, and a top plate with inlets for polymer melt placed at the mirror unit. The mold separation plane is between the nozzle plate and the LiGA frame. Reproduced with permission from Söchtig , Proc. SPIE , 44 (1997); Fig. 7. Copyright 1997, SPIE—The International Society for Optical Engineering.

Image of FIG. 2.
FIG. 2.

(Color online) Microelements designed for insertion into a silicon miocrobench with etched rails for registration. (a) Mold with outlines defined by the LiGA frame and by the DOE-lenses in the center. The four orifices at the upper side represent auxiliary structures for injection and pull-out during demolding. (b) Injection molded micro-optical element in polycarbonate with lenses at the front side. Reproduced with permission from Schift , Proc. SPIE , 122 (1998); Figs. 4 and 7. Copyright 1998, SPIE—The International Society for Optical Engineering.

Image of FIG. 3.
FIG. 3.

(Color online) Collimation arrangement for fiber-to-fiber coupling using injection molded microelements. (a) Two micro-optical elements in polycarbonate are clamped on MT-connector guide pins (700 m). (b) The lenses at the front side of the elements are designed to collimate the light of eight fibers.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Molding tool (handy mold) with two units (left side). The mirror side contains the gate (top) and the location of the patterned foil placement. (b) The clamping unit contains the mold insert with two mold cavities. The mold separation plane is between the polymer stamp on the mirror unit and the laser-machined insert on the clamping unit. (c) The imprinted PEEK foil and (d) its replication in PP μCs. Adapted with permission from Urwyler , Sens. Actuators A , 2 (2011); Figs. 1 and 6. Copyright 2011, Elsevier.

Image of FIG. 5.
FIG. 5.

(Color online) (a) Optical (top) and (b) SEM micrographs of completely molded microcantilevers with a diagonal line pattern (period 10 m, depth 5m, and width 5 m) transferred during an isothermal injection molding process from a foil-like mold insert to the surface (left side, size 500 × 80 × 35 m). In contrast to the unpatterned original beams, the surface patterned beams are wider (10%).

Image of FIG. 6.
FIG. 6.

(a) SEM micrographs showing microcantilever with pyramid patterns (period 4 m, footprint 2 m, and height 1.4 m) transferred during the molding process from a foil-like mold to the cantilever surface in an isothermal injection molding process. (b) Although the cavity is not completely filled, the pyramids are molded almost up to the tip of the cantilever.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface-patterned micromechanical elements by polymer injection molding with hybrid molds