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Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope
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10.1116/1.4826249
/content/avs/journal/jvstb/31/6/10.1116/1.4826249
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4826249
/content/avs/journal/jvstb/31/6/10.1116/1.4826249
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/content/avs/journal/jvstb/31/6/10.1116/1.4826249
2013-10-22
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4826249
10.1116/1.4826249
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