1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Analysis of strain in dielectric coated three dimensional Si micropillar arrays
Rent:
Rent this article for
USD
10.1116/1.4826500
/content/avs/journal/jvstb/31/6/10.1116/1.4826500
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4826500

Figures

Image of FIG. 1.
FIG. 1.

SEM images of silicon pillar structure (a) after DRIE etching, (b) after 10B coating deposition, and (c) after plasma etching of 10B coating and metallization. (Inset) Fractured square pillars.

Image of FIG. 2.
FIG. 2.

Raman spectra of 10B coated silicon micropillars.

Image of FIG. 3.
FIG. 3.

Raman spectra of silicon micropillars coated with PECVD SiN and LPCVD SiO films with different deposition time.

Image of FIG. 4.
FIG. 4.

(Color online) Plot of measured Raman peak position and stress vs deposition temperature for noncracked 10B coated micropillars.

Image of FIG. 5.
FIG. 5.

(Color online) Schematic of analyzed stress for a silicon micropillar.

Tables

Generic image for table
TABLE I.

List of silicon Raman peaks measured for 10B coated micropillar samples.

Generic image for table
TABLE II.

Thickness and wafer curvature stress values for films grown on flat silicon wafers.

Generic image for table
TABLE III.

Thickness, Raman peak, and extracted stress for SiO and SiN coatings on pillar samples (Tabulated from Fig. 3 ).

Loading

Article metrics loading...

/content/avs/journal/jvstb/31/6/10.1116/1.4826500
2013-10-22
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of strain in dielectric coated three dimensional Si micropillar arrays
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4826500
10.1116/1.4826500
SEARCH_EXPAND_ITEM