SEM images of silicon pillar structure (a) after DRIE etching, (b) after 10B coating deposition, and (c) after plasma etching of 10B coating and metallization. (Inset) Fractured square pillars.
Raman spectra of 10B coated silicon micropillars.
Raman spectra of silicon micropillars coated with PECVD SixNy and LPCVD SiO2 films with different deposition time.
(Color online) Plot of measured Raman peak position and stress vs deposition temperature for noncracked 10B coated micropillars.
(Color online) Schematic of analyzed stress for a silicon micropillar.
List of silicon Raman peaks measured for 10B coated micropillar samples.
Thickness and wafer curvature stress values for films grown on flat silicon wafers.
Thickness, Raman peak, and extracted stress for SiO2 and SiNx coatings on pillar samples (Tabulated from Fig. 3 ).
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