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Analysis of water adsorption in plasma-damaged porous low-k dielectric by controlled-atmosphere infrared spectroscopy
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10.1116/1.4827252
/content/avs/journal/jvstb/31/6/10.1116/1.4827252
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4827252
/content/avs/journal/jvstb/31/6/10.1116/1.4827252
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/content/avs/journal/jvstb/31/6/10.1116/1.4827252
2013-10-30
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Analysis of water adsorption in plasma-damaged porous low-k dielectric by controlled-atmosphere infrared spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/31/6/10.1116/1.4827252
10.1116/1.4827252
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