(Color online) Schematic cross section of the BST/parylene-C composite capacitor on a glass substrate (top). The dielectric thickness is approximately 300 nm, and the top electrode serves as the reference electrode. The same metal is used for the top and bottom electrodes, with the exception of a thin chromium adhesion/wetting layer applied to the glass prior to deposition of the bottom electrode. The parylene coating partially penetrates the nanoparticle film. The deposition is self-limiting; parylene initially fills the voids between the nanoparticles until a solid composite is formed and deposition proceeds on the surface. The fabricated capacitor array is also shown on the bottom. The electrodes are outside of the active region, which minimizes the damage during the testing.
(Color online) Frequency dependent relative dielectric constant (top group) and the loss tangent (bottom group) of the BST/parylene-C capacitors with silver, aluminum, gold, copper, and chromium electrodes. The high resistivity of the chromium electrodes leads to an unusually large effective series resistance (ESR), leading to an electrode-limited frequency response. In general, the electrode material has minimal influence on the dielectric property.
(Color online) Field tolerance of BST/parylene-C composite capacitors plotted against the electromigration parameter of the silver, aluminum, gold, and copper electrodes. The electromigration parameter for chromium does not appear to be reported in the literature and is plotted outside the group.
(Color online) Field tolerance of the BST/parylene-C composite capacitors plotted against (a) work function and (b) surface roughness of the silver, aluminum, gold, copper, and chromium electrodes.
Dielectric and electrode properties.
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