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Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps
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10.1116/1.4863316
/content/avs/journal/jvstb/32/2/10.1116/1.4863316
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/32/2/10.1116/1.4863316
/content/avs/journal/jvstb/32/2/10.1116/1.4863316
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/content/avs/journal/jvstb/32/2/10.1116/1.4863316
2014-02-06
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/32/2/10.1116/1.4863316
10.1116/1.4863316
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