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Tunable daughter molds from a single Si master grating mold
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10.1116/1.4892063
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    Affiliations:
    1 Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 3 Research link, Singapore 117602, Republic of Singapore and Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Republic of Singapore
    2 Department of Chemistry, Birla Institute of Technology and Science, Pilani-Hyderabad Campus, Jawahar Nagar, Shameerpet Mandal, Hyderabad 500 078 (Andhra Pradesh), India
    3 Department of Chemistry, Quaid-i-Azam University, Islamabad 45320, Republic of Pakistan
    4 Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 3 Research link, Singapore 117602, Republic of Singapore
    5 Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Republic of Singapore
    a) S. Kundu and S. H. Lim contributed equally to this work.
    b) Electronic mail: saifullahm@imre.a-star.edu.sg
    J. Vac. Sci. Technol. B 32, 051601 (2014); http://dx.doi.org/10.1116/1.4892063
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/content/avs/journal/jvstb/32/5/10.1116/1.4892063
2014-08-04
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tunable daughter molds from a single Si master grating mold
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/32/5/10.1116/1.4892063
10.1116/1.4892063
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