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In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high contrast gratings in TiO, with SiO as a sacrificial layer. The TiO film deposition and the etching processes are developed to yield grating bars without bending, and with near-ideal rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high contrast gratings show very good agreement with simulations, with a high reflectivity of >95% over a 25 nm wavelength span centered around 435 nm for the transverse-magnetic polarization.


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