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Silicon doping effects in reactive plasma etching
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10.1116/1.583405
/content/avs/journal/jvstb/4/2/10.1116/1.583405
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/4/2/10.1116/1.583405
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/content/avs/journal/jvstb/4/2/10.1116/1.583405
1986-03-01
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon doping effects in reactive plasma etching
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/4/2/10.1116/1.583405
10.1116/1.583405
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