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A hydraulic XY stage system for application in electron beam exposure systems
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10.1116/1.583927
/content/avs/journal/jvstb/5/1/10.1116/1.583927
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/5/1/10.1116/1.583927
/content/avs/journal/jvstb/5/1/10.1116/1.583927
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/content/avs/journal/jvstb/5/1/10.1116/1.583927
1987-01-01
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A hydraulic X–Y stage system for application in electron beam exposure systems
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/5/1/10.1116/1.583927
10.1116/1.583927
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