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Synchrotron radiation‐excited chemical‐vapor deposition and etching
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10.1116/1.583837
/content/avs/journal/jvstb/5/5/10.1116/1.583837
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/5/5/10.1116/1.583837
/content/avs/journal/jvstb/5/5/10.1116/1.583837
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/content/avs/journal/jvstb/5/5/10.1116/1.583837
1987-09-01
2015-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Synchrotron radiation‐excited chemical‐vapor deposition and etching
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/5/5/10.1116/1.583837
10.1116/1.583837
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