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Radiation damage in boron nitride x‐ray lithography masks
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10.1116/1.584036
/content/avs/journal/jvstb/6/1/10.1116/1.584036
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/6/1/10.1116/1.584036
/content/avs/journal/jvstb/6/1/10.1116/1.584036
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/content/avs/journal/jvstb/6/1/10.1116/1.584036
1988-01-01
2015-08-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radiation damage in boron nitride x‐ray lithography masks
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/6/1/10.1116/1.584036
10.1116/1.584036
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