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Dry etch induced damage in GaAs investigated using Raman scattering spectroscopy
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10.1116/1.584784
/content/avs/journal/jvstb/7/3/10.1116/1.584784
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/7/3/10.1116/1.584784
/content/avs/journal/jvstb/7/3/10.1116/1.584784
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/content/avs/journal/jvstb/7/3/10.1116/1.584784
1989-05-01
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dry etch induced damage in GaAs investigated using Raman scattering spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/7/3/10.1116/1.584784
10.1116/1.584784
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