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Resist stripping in an O2+H2O plasma downstream
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10.1116/1.585575
/content/avs/journal/jvstb/9/2/10.1116/1.585575
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/2/10.1116/1.585575
/content/avs/journal/jvstb/9/2/10.1116/1.585575
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/content/avs/journal/jvstb/9/2/10.1116/1.585575
1991-03-01
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Resist stripping in an O2+H2O plasma downstream
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/9/2/10.1116/1.585575
10.1116/1.585575
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